Sheet plasma configurations suitable for materials processing

Bibliografiske detaljer
Main Authors:	Ramos, Henry J. (Author), Doi, Kenta (Author), Fernandez, Marcedon S. (Author), Malapit, Giovanni M. (Author), Sasao, Mamiko (Author), Villamayor, Michelle Marie S. (Author), Wada, Motoi (Author)
Format:	Analytics
Sprog:	English
Udgivet:	2014.
Fag:	Ion beams. Magnetized sheet plasmas. Negative hydrogen ions. TiN. SiH.