A novel atmospheric pressure AC plasma jet system for deposition of titanium and titanium dioxide on silicon wafers

Detalles Bibliográficos
Autor Principal: Delos Santos, Mercy Ann C. (Author)
Formato: Thesis
Idioma:inglés
Publicado: 2015.
Subjects:
Acceso en liña:https://drive.google.com/file/d/0B4z4dtp29sZ7VVdRQ1FGSHZ1VG8/view?usp=sharing