A novel atmospheric pressure AC plasma jet system for deposition of titanium and titanium dioxide on silicon wafers

A novel atmospheric pressure AC plasma jet system for deposition of titanium and titanium dioxide on silicon wafers

Bibliographic Details
Main Author: Delos Santos, Mercy Ann C. (Author)
Format: Thesis
Language:English
Published: 2015.
Subjects:
Plasma jets.
Titanium.
Titanium dioxide.
Silicon.
Online Access:https://drive.google.com/file/d/0B4z4dtp29sZ7VVdRQ1FGSHZ1VG8/view?usp=sharing