Characteristics of TiAlSiN thin films grown using the magnetized sheet plasma system
| Egile nagusia: | |
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| Beste egile batzuk: | |
| Formatua: | Thesis |
| Hizkuntza: | English |
| Argitaratua: |
Quezon City
College of Engineering, University of the Philippines Diliman
2020.
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| Gaiak: | |
| Sarrera elektronikoa: | Abstract |