Characteristics of TiAlSiN thin films grown using the magnetized sheet plasma system
| Hovedforfatter: | |
|---|---|
| Andre forfattere: | |
| Format: | Thesis |
| Sprog: | English |
| Udgivet: |
Quezon City
College of Engineering, University of the Philippines Diliman
2020.
|
| Fag: | |
| Online adgang: | Abstract |