Characteristics of TiAlSiN thin films grown using the magnetized sheet plasma system
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| Awduron Eraill: | |
| Fformat: | Traethawd Ymchwil |
| Iaith: | English |
| Cyhoeddwyd: |
Quezon City
College of Engineering, University of the Philippines Diliman
2020.
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| Pynciau: | |
| Mynediad Ar-lein: | Abstract |