Silicon nitride (SiNxHy) by plasma-enhanced chemical vapor deposition
| Foilsithe in: | Science Diliman Vol. 13, no. 2 (Jul. 2001 - Dec. 2001), 26-28 |
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| Príomhchruthaitheoir: | |
| Rannpháirtithe: | , |
| Formáid: | Alt |
| Teanga: | English |
| Foilsithe / Cruthaithe: |
2001
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| Ábhair: |