Synthesis of ZrN film via the plasma sputter-type negative ion source

Synthesis of ZrN film via the plasma sputter-type negative ion source

Bibliografiske detaljer
Udgivet i:Science Diliman Vol. 11, no. 2 (1999), 39-43
Hovedforfatter: Valmoria, Nico
Andre forfattere: Mendenilla, Alexander, Yambot, Miguel, Mena, Manolo, Ramos, Henry
Format: Article
Sprog:English
Udgivet: 1999
Fag:
Ion sources
Plasma physics