Synthesis of ZrN film via the plasma sputter-type negative ion source

Synthesis of ZrN film via the plasma sputter-type negative ion source

Dades bibliogràfiques
Publicat a:Science Diliman Vol. 11, no. 2 (1999), 39-43
Autor principal: Valmoria, Nico
Altres autors: Mendenilla, Alexander, Yambot, Miguel, Mena, Manolo, Ramos, Henry
Format: Article
Idioma:English
Publicat: 1999
Matèries:
Ion sources
Plasma physics