Synthesis of ZrN film via the plasma sputter-type negative ion source

Synthesis of ZrN film via the plasma sputter-type negative ion source

Bibliografski detalji
Izdano u:Science Diliman Vol. 11, no. 2 (1999), 39-43
Glavni autor: Valmoria, Nico
Daljnji autori: Mendenilla, Alexander, Yambot, Miguel, Mena, Manolo, Ramos, Henry
Format: Članak
Jezik:English
Izdano: 1999
Teme:
Ion sources
Plasma physics