Synthesis of ZrN film via the plasma sputter-type negative ion source

Synthesis of ZrN film via the plasma sputter-type negative ion source

書目詳細資料
發表在:Science Diliman Vol. 11, no. 2 (1999), 39-43
主要作者: Valmoria, Nico
其他作者: Mendenilla, Alexander, Yambot, Miguel, Mena, Manolo, Ramos, Henry
格式: Article
語言:English
出版: 1999
主題:
Ion sources
Plasma physics