Pulsed 1064 nm Nd-YAG laser deposition of titanium on silicon in a nitrogen environment
| Publié dans: | Science Diliman Vol. 11, no. 2 (1999), 33-38 |
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| Auteur principal: | |
| Autres auteurs: | , , |
| Format: | Article |
| Langue: | English |
| Publié: |
1999
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| Sujets: |