Pulsed 1064 nm Nd-YAG laser deposition of titanium on silicon in a nitrogen environment
| Udgivet i: | Science Diliman Vol. 11, no. 2 (1999), 33-38 |
|---|---|
| Hovedforfatter: | |
| Andre forfattere: | , , |
| Format: | Article |
| Sprog: | English |
| Udgivet: |
1999
|
| Fag: |