Transverse beam profile analysis of a plasma sputter ion source

Transverse beam profile analysis of a plasma sputter ion source

Bibliografske podrobnosti
izdano v:Science Diliman Vol. 10, no. 1 (1998), 21-30
Glavni avtor: Mendenilla, Alexander
Drugi avtorji: Blanca, Carlo Mar, Ramos, Henry
Format: Article
Jezik:English
Izdano: 1998
Teme:
Plasma physics
Ion sources
Ion beams