Transverse beam profile analysis of a plasma sputter ion source

Bibliographic Details
Published in:	Science Diliman Vol. 10, no. 1 (1998), 21-30
Main Author:	Mendenilla, Alexander
Other Authors:	Blanca, Carlo Mar, Ramos, Henry
Format:	Article
Language:	English
Published:	1998
Subjects:	Plasma physics Ion sources Ion beams