Applications of plasma processes to VLSI technology

Plasma metallurgy: the prinmciples. by Dembovsky, Vladimir

Plasma polymerization by Yasuda, H.

Plasma physics via computer simulation by Birdsall, Charles K.

Dry etching for microelectronics

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Advances in low-temperature plasma chemistry, technology, applications.

Introduction to plasma physics and controlled fusion by Chen, Francis F. 1929-

1984 International Conference on Plasma Physics proceedings invited papers, volume I, June 27-July 3, 1984, Lausanne, Switzerland

Radiation in plasmas by McNamara, B. (Brendon)

Plasma chromatography. by Carr, Timothy W.