Search Results - "Microlithography"

Lithography main techniques

Semiconductor lithography principles, practices, and materials by Moreau, Wayne M.

Handbook of microlithography, micromachining, and microfabrication

Handbook of VLSI microlithography principles, technology, and applications

Also available online for University of the Philippines Diliman via ScienceDirect. Click here to access

Electronic and photonic applications of polymers

Available for University of the Philippines Diliman via ACS Publications. Click here to access
Also available remotely for University of the Philippines Diliman via ACS Publications. Click here to access thru EZproxy

Polymers in microlithography materials and processes

Available for University of the Philippines Diliman via ACS Publications. Click here to access
Also available remotely for University of the Philippines Diliman via ACS Publications. Click here to access thru EZproxy

Handbook of VLSI microlithography principles, technology, and applications

Available for University of the Philippines System via ScienceDirect. Click here to access
Also available remotely for University of the Philippines System via ScienceDirect. Click here to access thru EZproxy

Microlithography process technology for IC fabrication by Elliot, David J.

Microcircuit Engineering 91 proceedings of the International Conference on Microlithography, September 17-19, 1991, Rome, Italy

Introduction to microlithography theory, materials, and processing

Available for University of the Philippines Diliman via ACS Publications. Click here to access
Also available remotely for University of the Philippines Diliman via ACS Publications. Click here to access thru EZproxy