MEMS & microsystems design and manufacture by Hsu, Tai-Ran

Microsystem design by Senturia, Stephen D. 1940-

Micro mechanical transducers pressure sensors, accelerometers, and gyroscopes by Bao, Min-Hang

Table of contents only

Micro mechanical systems principles and technology

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Micromechanics and MEMS classic and seminal papers to 1990

The semiconductor industry and the national laboratories part of a national strategy

Design and implementation of a high sensitivity differential capacitance sensing circuit for MEMS accelerometers by Estrada, Erik John C.

Development of a high sensitivity MEMS accelerometer for bipedal robots by Manglicmot, Lester Ryan G.

Cricket-based robots. by Birch, M.C

MEMS in space. by Cass, S.