Microfabrication and nanomanufacturing

Mechanical design of microresonators modeling and applications by Lobontiu, Nicolae

MEMS applications

MEMS design and fabrication

MEMS introduction and fundamentals

Nano- and micro-electromechanical systems fundamentals of nano- and microengineering by Lyshevski, Sergey Edward

MEMS/MOEMS packaging concepts, designs, materials, and processes by Gilleo, Ken

Available for University of the Philippines Diliman via McGraw-Hill eBook Library. Click here to access
Also available remotely for University of the Philippines Diliman via McGraw-Hill eBook Library. Click here to access thru Remote Access via EZProxy

MEMS packaging

Available for University of the Philippines Diliman via IET Digital Library. Click here to access
Also available remotely for University of the Philippines Diliman via IET Digital Library. Click here to access thru EZproxy

RF MEMS theory, design, and technology by Rebeiz, Gabriel M.

Table of contents

Silicon wafer bonding technology for VLSI and MEMS applications

Available for University of the Philippines Diliman via IET Digital Library. Click here to access
Also available remotely for University of the Philippines Diliman via IET Digital Library. Click here to access thru EZproxy