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1
Handbook of silicon based MEMS materials and technologies
Published 2020Available for University of the Philippines System via ScienceDirect. Click here to access
Also available remotely for University of the Philippines System via ScienceDirect. Click here to access thru EZproxy
Electronic Resource -
2
Handbook of silicon based MEMS materials and technologies
Published 2015Available for University of the Philippines System via ScienceDirect. Click here to access
Also available remotely for University of the Philippines System via ScienceDirect. Click here to access thru EZproxy
Electronic Resource -
3
MEMS materials and processes handbook
Published 2011Available for University of the Philippines Diliman via SpringerLink. Click here to access
Electronic Resource


