Design and development of MEMS based guided beam type piezoelectric energy harvester von Saxena, Shanky, Sharma, Ritu, Pant, B. D.

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MEMS field models and optimal design von Di Barba, Paolo, Wiak, Slawomir

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Introduction to microsystem design von Schomburg, Werner Karl 1955-

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Introduction to microsystem design von Schomburg, Werner Karl

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Electromechanical systems in microtechnology and mechatronics electrical, mechanical and acoustic networks, their interactions and applications von Lenk, Arno

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Mechanical design of microresonators modeling and applications von Lobontiu, Nicolae

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Microfabrication and nanomanufacturing

Mechanical design of microresonators modeling and applications von Lobontiu, Nicolae

MEMS design and fabrication

Microsystem design von Senturia, Stephen D. 1940-