Design and manufacturing of active microsystems

Available for the University of the Philippines Diliman via SpringerLink. Click here to access

Electromechanical systems in microtechnology and mechatronics electrical, mechanical and acoustic networks, their interactions and applications Por Lenk, Arno

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Control technologies for emerging micro and nanoscale systems

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MEMS and nanotechnology. proceedings of the 2010 annual conference on experimental and applied mechanics

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MEMS and nanotechnology. proceedings of the 2011 Annual Conference on Experimental and Applied Mechanics

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MEMS linear and nonlinear statics and dynamics Por Younis, Mohammad Ibrahim 1977-

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MEMS materials and processes handbook

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MEMS reliability Por Hartzell, Allyson L.

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Microsystems dynamics Por Ostasevicius, Vytautas

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Sensors and microsystems AISEM 2010 Proceedings

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