Introduction to VLSI process engineering

VLSI algorithms and architectures advanced concepts

Design automation for timing-driven layout synthesis by Sapatnekar, Sachin S.

Statistical modeling for computer-aided design of MOS VLSI circuits by Michael, Christopher

Handbook of VLSI chip design and expert systems by Schwarz, A.F

Custom VLSI microelectronics by Hurst, Stanley L.

Algorithmic and knowledge based CAD for VLSI

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Microcircuit Engineering 91 proceedings of the International Conference on Microlithography, September 17-19, 1991, Rome, Italy

Handbook of VLSI microlithography principles, technology, and applications

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Diagnostic measurements in LSI/VLSI integrated circuits production by Jakubowski, Andrzej