Introduction to nMOS and CMOS VLSI systems design von Mukherjee, Amar

Principles of CMOS VLSI design a systems perspective von Weste, Neil H. E.

Integrated circuits chemical and physical processing

Available for University of the Philippines Diliman via ACS Publications. Click here to access
Also available remotely for University of the Philippines Diliman via ACS Publications. Click here to access thru EZproxy

Applications of plasma processes to VLSI technology

Integrated circuits chemical and physical processing developed from the winter symposium von Stroeve, Pieter, 1945-

IEEE Transactions on VLSI systems.