Basic VLSI design; systems and circuits by Pucknell, Douglas A. ( Douglas Albert ), 1927-

CMOS3 cell library. by Heinbuch, Dennis V.

Introduction to microelectronic fabrication Richard C. Jaeger. by Jaeger, Richard C.

Computer aided tools for VLSI system design

Introduction to nMOS and CMOS VLSI systems design by Mukherjee, Amar

Microlithography process technology for IC fabrication by Elliot, David J.

Principles of CMOS VLSI design a systems perspective by Weste, Neil H. E.

Integrated circuits chemical and physical processing

Available for University of the Philippines Diliman via ACS Publications. Click here to access
Also available remotely for University of the Philippines Diliman via ACS Publications. Click here to access thru EZproxy

Applications of plasma processes to VLSI technology

Integrated circuits chemical and physical processing developed from the winter symposium by Stroeve, Pieter, 1945-