Basic vacuum technology по Chambers, A.

Handbook of vacuum science and technology

Electron physics of vacuum and gaseous devices по Sedlacek, Miroslav

Vacuum physics and techniques по Delchar, T. A.

Vacuum technology practical heat treating and brazing

The physical basis of ultrahigh vacuum. по Redhead, P.A

Vacuum sealing techniques. по Roth, A. (Alexander)

Vacuum technology: practical heat treating and braz0ing. по Fabian, Roger

Vacuum engineering calculations, formulas, and solved exercises по Berman, A.

Available for University of the Philippines System via ScienceDirect. Click here to access
Also available remotely for University of the Philippines System via ScienceDirect. Click here to access thru EZproxy

Journal of vacuum science & technology. B, Microelectronics and nanometer structures.