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Vacuum engineering calculations, formulas, and solved exercises
Publicat 1992Available for University of the Philippines System via ScienceDirect. Click here to access
Also available remotely for University of the Philippines System via ScienceDirect. Click here to access thru EZproxy
Electronic Resource -
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Journal of vacuum science & technology. B, Microelectronics and nanometer structures.
Publicat 1991Continuing Resource