-
1
Enhancement of TiN deposition rate in a magnetized sheet plasma source
Опубликовано 2008Диссертация -
2
Thermal stability study on titanium disilicide (TiSi2) thin films with titanium nitride (TiN) capping
Опубликовано 2003Диссертация -
3
-
4
Pulsed 1064 nm Nd-YAG laser deposition of titanium on silicon in a nitrogen environment
Опубликовано в: Science Diliman (1999)Статья -
5
-
6
-
7