Dry etching technology for semiconductors av Nojiri, Kazuo

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Formation of nanopillars on 4H-SiC via self-masking CF4 plasma etching in a gas disharge ion source av Gines, Arnold Rey B.

Reactive ion etching of GaAs structures using BCl3 av Mailig, Rengie Mark D.

Parametric study of the reactive ion etching of silicon av Sotto, Romelyn H.

Principles of plasma discharges and materials processing av Lieberman, M. A.

Plasma deposition, treatment, and etching of polymers the treatment and etching of polymers

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Plasma deposition, treatment, and etching of polymers. av D'Agostino, Riccardo

Plasma etching an introduction

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Plasma etching an introduction. av Manos, Dennis M.

Applications of plasma processes to VLSI technology