Dry etching technology for semiconductors door Nojiri, Kazuo

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Formation of nanopillars on 4H-SiC via self-masking CF4 plasma etching in a gas disharge ion source door Gines, Arnold Rey B.

Reactive ion etching of GaAs structures using BCl3 door Mailig, Rengie Mark D.

Parametric study of the reactive ion etching of silicon door Sotto, Romelyn H.

Principles of plasma discharges and materials processing door Lieberman, M. A.

Plasma deposition, treatment, and etching of polymers the treatment and etching of polymers

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Plasma deposition, treatment, and etching of polymers. door D'Agostino, Riccardo

Plasma etching an introduction

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Plasma etching an introduction. door Manos, Dennis M.

Applications of plasma processes to VLSI technology