Dry etching technology for semiconductors di Nojiri, Kazuo

Available for University of the Philippines System via SpringerLink. Click here to access
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Formation of nanopillars on 4H-SiC via self-masking CF4 plasma etching in a gas disharge ion source di Gines, Arnold Rey B.

Reactive ion etching of GaAs structures using BCl3 di Mailig, Rengie Mark D.

Parametric study of the reactive ion etching of silicon di Sotto, Romelyn H.

Principles of plasma discharges and materials processing di Lieberman, M. A.

Plasma deposition, treatment, and etching of polymers the treatment and etching of polymers

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Plasma deposition, treatment, and etching of polymers. di D'Agostino, Riccardo

Plasma etching an introduction

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Plasma etching an introduction. di Manos, Dennis M.

Applications of plasma processes to VLSI technology