Dry etching technology for semiconductors מאת Nojiri, Kazuo

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Formation of nanopillars on 4H-SiC via self-masking CF4 plasma etching in a gas disharge ion source מאת Gines, Arnold Rey B.

Reactive ion etching of GaAs structures using BCl3 מאת Mailig, Rengie Mark D.

Parametric study of the reactive ion etching of silicon מאת Sotto, Romelyn H.

Principles of plasma discharges and materials processing מאת Lieberman, M. A.

Plasma deposition, treatment, and etching of polymers the treatment and etching of polymers

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Plasma deposition, treatment, and etching of polymers. מאת D'Agostino, Riccardo

Plasma etching an introduction

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Plasma etching an introduction. מאת Manos, Dennis M.

Applications of plasma processes to VLSI technology