Dry etching technology for semiconductors nork Nojiri, Kazuo

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Formation of nanopillars on 4H-SiC via self-masking CF4 plasma etching in a gas disharge ion source nork Gines, Arnold Rey B.

Reactive ion etching of GaAs structures using BCl3 nork Mailig, Rengie Mark D.

Parametric study of the reactive ion etching of silicon nork Sotto, Romelyn H.

Principles of plasma discharges and materials processing nork Lieberman, M. A.

Plasma deposition, treatment, and etching of polymers the treatment and etching of polymers

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Plasma deposition, treatment, and etching of polymers. nork D'Agostino, Riccardo

Plasma etching an introduction

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Plasma etching an introduction. nork Manos, Dennis M.

Applications of plasma processes to VLSI technology