Dry etching technology for semiconductors ανά Nojiri, Kazuo

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Formation of nanopillars on 4H-SiC via self-masking CF4 plasma etching in a gas disharge ion source ανά Gines, Arnold Rey B.

Reactive ion etching of GaAs structures using BCl3 ανά Mailig, Rengie Mark D.

Parametric study of the reactive ion etching of silicon ανά Sotto, Romelyn H.

Principles of plasma discharges and materials processing ανά Lieberman, M. A.

Plasma deposition, treatment, and etching of polymers the treatment and etching of polymers

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Plasma deposition, treatment, and etching of polymers. ανά D'Agostino, Riccardo

Plasma etching an introduction

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Plasma etching an introduction. ανά Manos, Dennis M.

Applications of plasma processes to VLSI technology