Dry etching technology for semiconductors per Nojiri, Kazuo

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Formation of nanopillars on 4H-SiC via self-masking CF4 plasma etching in a gas disharge ion source per Gines, Arnold Rey B.

Reactive ion etching of GaAs structures using BCl3 per Mailig, Rengie Mark D.

Parametric study of the reactive ion etching of silicon per Sotto, Romelyn H.

Principles of plasma discharges and materials processing per Lieberman, M. A.

Plasma deposition, treatment, and etching of polymers the treatment and etching of polymers

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Plasma deposition, treatment, and etching of polymers. per D'Agostino, Riccardo

Plasma etching an introduction

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Plasma etching an introduction. per Manos, Dennis M.

Applications of plasma processes to VLSI technology