Dry etching technology for semiconductors অনুযায়ী Nojiri, Kazuo

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Formation of nanopillars on 4H-SiC via self-masking CF4 plasma etching in a gas disharge ion source অনুযায়ী Gines, Arnold Rey B.

Reactive ion etching of GaAs structures using BCl3 অনুযায়ী Mailig, Rengie Mark D.

Parametric study of the reactive ion etching of silicon অনুযায়ী Sotto, Romelyn H.

Principles of plasma discharges and materials processing অনুযায়ী Lieberman, M. A.

Plasma deposition, treatment, and etching of polymers the treatment and etching of polymers

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Plasma deposition, treatment, and etching of polymers. অনুযায়ী D'Agostino, Riccardo

Plasma etching an introduction

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Plasma etching an introduction. অনুযায়ী Manos, Dennis M.

Applications of plasma processes to VLSI technology