Dry etching technology for semiconductors حسب Nojiri, Kazuo

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Formation of nanopillars on 4H-SiC via self-masking CF4 plasma etching in a gas disharge ion source حسب Gines, Arnold Rey B.

Reactive ion etching of GaAs structures using BCl3 حسب Mailig, Rengie Mark D.

Parametric study of the reactive ion etching of silicon حسب Sotto, Romelyn H.

Principles of plasma discharges and materials processing حسب Lieberman, M. A.

Plasma deposition, treatment, and etching of polymers the treatment and etching of polymers

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Plasma deposition, treatment, and etching of polymers. حسب D'Agostino, Riccardo

Plasma etching an introduction

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Plasma etching an introduction. حسب Manos, Dennis M.

Applications of plasma processes to VLSI technology