Non-traditional micromachining processes fundamentals and applications

Available for University of the Philippines Diliman via SpringerLink. Click here to access
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Micromanufacturing processes

Available for University of the Philippines Diliman College of Engineering via CRCnetBASE. Click here to access
Also available remotely for University of the Philippines Diliman College of Engineering via CRCnetBASE. Click here to access thru EZproxy

Nano and micromachining

Semiconductor micromachining

Handbook of microlithography, micromachining, and microfabrication

Reinventing the factory di Harmon, Roy L., Peterson, Leroy D.