Lithography main techniques

Handbook of microlithography, micromachining, and microfabrication

Microcircuit Engineering 91 proceedings of the International Conference on Microlithography, September 17-19, 1991, Rome, Italy

Handbook of VLSI microlithography principles, technology, and applications

Available for University of the Philippines System via ScienceDirect. Click here to access
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Handbook of VLSI microlithography principles, technology, and applications

Also available online for University of the Philippines Diliman via ScienceDirect. Click here to access

Polymers in microlithography materials and processes

Available for University of the Philippines Diliman via ACS Publications. Click here to access
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Laser microfabrication thin film processes and lithography

Available for University of the Philippines System via ScienceDirect. Click here to access
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Semiconductor lithography principles, practices, and materials حسب Moreau, Wayne M.

Electronic and photonic applications of polymers

Available for University of the Philippines Diliman via ACS Publications. Click here to access
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Polymers for high technology electronics and photonics

Available for University of the Philippines Diliman via ACS Publications. Click here to access
Also available remotely for University of the Philippines Diliman via ACS Publications. Click here to access thru EZproxy