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  1. 1

    Surface studies on silicon nitride thin filmcfabricated using ion beam deposition of filtered cathodic vacuum arc system by Tabajonda, Rowel Vigare

    Thesis


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  2. 2

    Parametric and kinetic study of silicon nitride film deposition on silicon wafer by low pressure chemical vapor deposition (LPCVD) method by Velasco, Angelito A.

    Published 2002
    Thesis


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  3. 3

    Etch-stop mechanisms in plasma-assisted atomic layer etching of silicon nitride: a molecular dynamics study by Tercero, Jomar U.

    Published 2021
    Abstract
    Thesis


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  4. 4

    Growth of diamond-like carbon thin films as overcoats on silicon and silicon nitride by Ilasin, Mark D.

    Published 2023
    Abstract
    Thesis


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  5. 5

    Silicon nitride 93 proceedings of the International Conference on Silicon Nitride-Based Ceramics, Stuttgart, October 4-6, 1993

    Published 1994
    Book


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  6. 6

    Silicon nitride in electronics

    Published 1988
    Book


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  7. 7

    Characterization and corrosion study of sinx thin film coating in nife alloy by Caspillo, Marites Estal

    Thesis


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  8. 8

    Parametric and kinetic study of silicon nitride film deposition on silicon wafer by Low Pressure Chemical Vapor Deposition (LPCVD) method by Velasco, Angelito A.

    Published in Philippine Engineering Journal (2002)
    Article


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  9. 9

    Silicon nitride (SiNxHy) by plasma-enhanced chemical vapor deposition by Manay, R.L

    Published in Science Diliman (2001)
    Article


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