Growth of diamond-like carbon thin films as overcoats on silicon and silicon nitride по Ilasin, Mark D.

Abstract

Etch-stop mechanisms in plasma-assisted atomic layer etching of silicon nitride: a molecular dynamics study по Tercero, Jomar U.

Abstract

Parametric and kinetic study of silicon nitride film deposition on silicon wafer by low pressure chemical vapor deposition (LPCVD) method по Velasco, Angelito A.

Parametric and kinetic study of silicon nitride film deposition on silicon wafer by Low Pressure Chemical Vapor Deposition (LPCVD) method по Velasco, Angelito A.

Silicon nitride (SiNxHy) by plasma-enhanced chemical vapor deposition по Manay, R.L

Silicon nitride 93 proceedings of the International Conference on Silicon Nitride-Based Ceramics, Stuttgart, October 4-6, 1993

Silicon nitride in electronics

Surface studies on silicon nitride thin filmcfabricated using ion beam deposition of filtered cathodic vacuum arc system по Tabajonda, Rowel Vigare

Characterization and corrosion study of sinx thin film coating in nife alloy по Caspillo, Marites Estal