Torthaí cuardaigh

Surface studies on silicon nitride thin filmcfabricated using ion beam deposition of filtered cathodic vacuum arc system de réir Tabajonda, Rowel Vigare

Parametric and kinetic study of silicon nitride film deposition on silicon wafer by low pressure chemical vapor deposition (LPCVD) method de réir Velasco, Angelito A.

Etch-stop mechanisms in plasma-assisted atomic layer etching of silicon nitride: a molecular dynamics study de réir Tercero, Jomar U.

Abstract

Growth of diamond-like carbon thin films as overcoats on silicon and silicon nitride de réir Ilasin, Mark D.

Abstract

Silicon nitride 93 proceedings of the International Conference on Silicon Nitride-Based Ceramics, Stuttgart, October 4-6, 1993

Silicon nitride in electronics

Characterization and corrosion study of sinx thin film coating in nife alloy de réir Caspillo, Marites Estal

Parametric and kinetic study of silicon nitride film deposition on silicon wafer by Low Pressure Chemical Vapor Deposition (LPCVD) method de réir Velasco, Angelito A.

Silicon nitride (SiNxHy) by plasma-enhanced chemical vapor deposition de réir Manay, R.L