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Parametric study of the reactive ion etching of silicon by Sotto, Romelyn H.

Formation of nanopillars on 4H-SiC via self-masking CF4 plasma etching in a gas disharge ion source by Gines, Arnold Rey B.

Reactive ion etching of GaAs structures using BCl3 by Mailig, Rengie Mark D.

Introduction to microlithography theory, materials, and processing

Available for University of the Philippines Diliman via ACS Publications. Click here to access
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Principles of plasma discharges and materials processing by Lieberman, M. A. ( Michael A.)

Dry etching technology for semiconductors by Nojiri, Kazuo

Available for University of the Philippines System via SpringerLink. Click here to access
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Applications of plasma processes to VLSI technology

Plasma etching an introduction

Available for University of the Philippines System via ScienceDirect. Click here to access
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Plasma deposition, treatment, and etching of polymers the treatment and etching of polymers

Available for University of the Philippines System via ScienceDirect. Click here to access
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Dry etching for microelectronics

Available for University of the Philippines System via ScienceDirect. Click here to access
Also available remotely for University of the Philippines System via ScienceDirect. Click here to access thru EZproxy