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Introduction to microlithography theory, materials, and processing
出版事項 1983Available for University of the Philippines Diliman via ACS Publications. Click here to access
Also available remotely for University of the Philippines Diliman via ACS Publications. Click here to access thru EZproxy
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Plasma deposition, treatment, and etching of polymers the treatment and etching of polymers
出版事項 1990Available for University of the Philippines System via ScienceDirect. Click here to access
Also available remotely for University of the Philippines System via ScienceDirect. Click here to access thru EZproxy
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