Non-traditional micromachining processes fundamentals and applications

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Micromanufacturing processes

Available for University of the Philippines Diliman College of Engineering via CRCnetBASE. Click here to access
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Nano and micromachining

Semiconductor micromachining

Handbook of microlithography, micromachining, and microfabrication

Reinventing the factory 由 Harmon, Roy L., Peterson, Leroy D.