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  1. 1

    Synthesis of aluminum nitride thin film using reactive RF-magnetron sputtering by Semblante, Oliver D.

    Thesis


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  2. 2

    Growth of indium aluminum nitride films using reactive rf-magnetron sputtering by Ceniza, Claude R.

    Published 2012
    Thesis


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  3. 3

    Aluminum nitride/ air-gap structures fabricated via selective wet chemical etching by Abat, Jonathan Ray R.

    Published 2013
    Thesis


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  4. 4

    Aluminium nitride

    Published 1994
    Book


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