Handbook of silicon based MEMS materials and technologies - Tilli, Markku; Paulasto-Krockel, Mervi; Petzold, Matthias; Theuss, Horst; Motooka, Teruaki; Lindroos, Veikko (London Elsevier, 2020)
Electronic reproduction.
Keywords: Microelectromechanical systems; Microelectromechanical systems -- Materials; Silicon -- Electric properties; Electronic books