An investigation into the supercritical CO₂/Co-solvent extraction of porogen and surfactant templates from organosilicate thin films for low-k applications - Lubguban, Arnold A. (Ann Arbor Michigan ProQuest Information and Learning Company, 2006)
Thesis (M.S.)--University of Missouri-Columbia, 2005.
Keywords: Supercritical fluid extraction; Carbon dioxide; Solvent extraction