Micro- and nanopatterning polymers - Ito, Hiroshi; Reichmanis, Elsa; Nalamasu, Omkaram; Ueno, Takumi; American Chemical Society. Division of Polymeric Materials: Science and Engineering; American Chemical Society. Meeting 1997 Las Vegas, Nev.). (Washington, DC American Chemical Society, 1998)
Includes bibliographical references and indexes.
Electronic reproduction.
Keywords: Microelectronics -- Materials; Polymeric composites; Photoresists -- Materials; Electronic books