Polymers for microelectronics resists and dielectrics - Thompson, L. F. 1944-; Willson, C. G. (C. Grant) 1939-; Tagawa, Seiichi; American Chemical Society. Division of Polymeric Materials: Science and Engineering; American Chemical Society. Meeting 1992 San Francisco, Calif.). (Washington, DC American Chemical Society, 1993)
Includes bibliographical references and indexes.
Electronic reproduction.
Keywords: Microelectronics -- Materials -- Congresses; Polymers -- Congresses; Electronic books