Polymers in microlithography materials and processes

গ্রন্থ-পঞ্জীর বিবরন
অন্যান্য লেখক:	Reichmanis, Elsa 1953- (Editor), MacDonald, Scott A. (Editor), Iwayanagi, Takao 1949- (Editor)
বিন্যাস:	Electronic Resource
ভাষা:	English
প্রকাশিত:	Washington, DC American Chemical Society [1989]
বিষয়গুলি:	Polymers > Congresses. Photoresists > Congresses. Microlithography > Materials > Congresses. Electronic books.
অনলাইন ব্যবহার করুন:	Available for University of the Philippines Diliman via ACS Publications. Click here to access Also available remotely for University of the Philippines Diliman via ACS Publications. Click here to access thru EZproxy