Polymers in microlithography materials and processes

Bibliographic Details
Other Authors:	Reichmanis, Elsa 1953- (Editor), MacDonald, Scott A. (Editor), Iwayanagi, Takao 1949- (Editor)
Format:	Electronic Resource
Language:	English
Published:	Washington, DC American Chemical Society [1989]
Subjects:	Polymers > Congresses. Photoresists > Congresses. Microlithography > Materials > Congresses. Electronic books.
Online Access:	Available for University of the Philippines Diliman via ACS Publications. Click here to access Also available remotely for University of the Philippines Diliman via ACS Publications. Click here to access thru EZproxy