Polymers in microlithography materials and processes

Bibliografiska uppgifter
Övriga upphovsmän:	Reichmanis, Elsa 1953- (Utgivare, redaktör, sammanställare), MacDonald, Scott A. (Utgivare, redaktör, sammanställare), Iwayanagi, Takao 1949- (Utgivare, redaktör, sammanställare)
Materialtyp:	Electronic Resource
Språk:	English
Publicerad:	Washington, DC American Chemical Society [1989]
Ämnen:	Polymers > Congresses. Photoresists > Congresses. Microlithography > Materials > Congresses. Electronic books.
Länkar:	Available for University of the Philippines Diliman via ACS Publications. Click here to access Also available remotely for University of the Philippines Diliman via ACS Publications. Click here to access thru EZproxy