Polymers in microlithography materials and processes

Библиографические подробности
Другие авторы:	Reichmanis, Elsa 1953- (Редактор), MacDonald, Scott A. (Редактор), Iwayanagi, Takao 1949- (Редактор)
Формат:	Electronic Resource
Язык:	English
Опубликовано:	Washington, DC American Chemical Society [1989]
Предметы:	Polymers > Congresses. Photoresists > Congresses. Microlithography > Materials > Congresses. Electronic books.
Online-ссылка:	Available for University of the Philippines Diliman via ACS Publications. Click here to access Also available remotely for University of the Philippines Diliman via ACS Publications. Click here to access thru EZproxy