Polymers in microlithography materials and processes

Xehetasun bibliografikoak
Beste egile batzuk:	Reichmanis, Elsa 1953- (Argitaratzailea), MacDonald, Scott A. (Argitaratzailea), Iwayanagi, Takao 1949- (Argitaratzailea)
Formatua:	Electronic Resource
Hizkuntza:	English
Argitaratua:	Washington, DC American Chemical Society [1989]
Gaiak:	Polymers > Congresses. Photoresists > Congresses. Microlithography > Materials > Congresses. Electronic books.
Sarrera elektronikoa:	Available for University of the Philippines Diliman via ACS Publications. Click here to access Also available remotely for University of the Philippines Diliman via ACS Publications. Click here to access thru EZproxy